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Toshiba and Canon to develop "nano-imprint" lithograph


Friday, February 28, 2014

Toshiba, the world's second-largest maker of NAND flash memory behind Samsung Electronics, will work with fab-tool maker Canon to develop 15nm NAND chips with volume production slated for 2015, according to a report in the Japanese-language Nikkan Kogyo Shimbun.

Toshiba and Canon will jointly develop a lithography technology dubbed "nano-imprint" to manufacture 15nm NAND flash products, the report indicated. Related R&D and manufacturing will take place at Toshiba's Yokkaichi plant in Mie prefecture, the report said.

Toshiba's most-advanced production process for NAND flash memory available is 19nm.

By: DocMemory
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