Rapidus has taken delivery of an ASML EUV machine for installation at its Innovative Integration for Manufacturing (IIM-1) foundry under construction in Chitose, Hokkaido.

It is the first time that an EUV tool will be used for mass production in Japan.

The TWINSCAN machine (pictured) is an NXE:3800E tool which operates at a wavelength of IMG_0588-150x150.jpeg13.5nm and can process 220 wafers an hour.

Rapidus will install additional semiconductor manufacturing equipment, as well as full automated material handling systems in its IIM-1 foundry to optimise 2nm generation GAA semiconductor manufacturing.

By: DocMemory
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