Therma-Wave Inc. today claimed a multi-million dollar order for its Therma-Probe XP 300mm ion implant monitoring tools from a leading, undisclosed Asia-based DRAM producer.

Currently, there are more than 400 Therma-Probe systems installed worldwide, inclusive of the world's top 40 IC manufacturers, the process control metrology company said. The XP Series, designed to reproducibly provide results in measuring 90nm technology node and beyond, is the most advanced in the family of Therma-Probe tools.

"Therma-Wave's 300mm Therma-Probe XP ion implant monitoring tools were chosen largely based on the products' superior technical performance," said Boris Lipkin, Therma-Wave's president and CEO, in a statement. "Our tools continue to be positively accepted in the field, including throughout Southeast Asia. This development further strengthens our leadership position in the ion implant monitoring business and reinforces our customer's receptiveness to our products."

By: DocMemory
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