Semiconductor equipment supplier Aviza Technology Inc. today announced that it has received multiple system orders from Shanghai, China-based foundry Semiconductor Manufacturing International Corp. (SMIC) for the RVP-300plus and RVP-550 thermal processing systems.

The tools will be shipped to SMIC's Fab 4 in Beijing, China's first 300mm wafer fab created in 2004.

"This multiple system order marks a milestone for Aviza, placing the first RVP-300plus systems in China's only 300mm fab located at SMIC's Beijing Fab 4," said May Su, VP and general manager, thermal business unit of Aviza, in a statement. "The RVP-550 next-generation minibatch tools are repeat orders that came as a result of a successful system evaluation. We are pleased that SMIC has selected our production-proven thermal processing systems and look forward to supporting SMIC's Fab 4."
 
The RVP-300plus is a production-proven 300mm furnace known for best on-wafer results, combining productivity with a full complement of atmospheric and LPCVD process solutions, according to the company. This is accomplished by employing features such as fast temperature ramp-up and ramp-down capability, which results in uniform chemical deposition and temperature control across the wafer. The RVP-300plus uses a dual-boat configuration resulting in increased throughput.

The RVP-550 vertical thermal processor for 300mm batch wafer processing is designed for process capability and production requirements through the 65nm node and beyond. The tool offers enhanced throughput as a result of its dual-boat platform. In addition, variable load sizes, fast temperature ramping and Aviza's Cross-Flow technology make the RVP-550 a cost-effective choice for a multitude of advanced furnace processes, the company said.

By: DocMemory
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